Wafer Transfer Robot
| For vacuum environment | ||
|---|---|---|
| Wafer size | Single arm | Double arm |
| 200〜300mm | UT-VFX3000NM series UT-VDX3000NS series |
UT-VSW3000NS series UTVW-R2800H UT-VDW3000HS series |
| For atmospheric environment | ||
|---|---|---|
| Wafer size | Single arm | Double arm |
| 〜300mm | UT-AFX4000 UT-AFX3000NM UTX-RF5500RW (Water proof model) |
UT-AXW3000NS UTM-R3700F (Wide range operating model) UT-AFW4000 UT-AFW3000NM UTW-REH5500 (High speed model) UTW-RF5500RW (Water proof model) |
Wafer Aligner
| For vacuum environment | Applicable aligner | ||||
|---|---|---|---|---|---|
| 50mm | OFH-4103 | ||||
| 100mm | OFH-4102 | ||||
| 150mm | OFH-4101 | ||||
| 200mm | OFH-4100 | ||||
| 300mm | EG-303 | ||||
FPD Transfer Robot
| For vacuum environment | |||||
|---|---|---|---|---|---|
| Payload | Panel size (reference) | Single arm | Double arm | ||
| Without Z-axis | With Z-axis | Link arm | Linear slide | ||
| 3kg | G2 | SPR-801R | SPR-804R | ||
| 15kg | G4.5 | SPR-811R | |||
| 35kg | G4.5 | SPR-8565 | |||
| 50kg | G5 | SPR-8566 | |||
| 70kg | G5.5 | SPR-8508R | |||
| 85kg | G6 | SPR-8571 | SPR-8572 | ||
| 120kg | G6 | SPR-8573 | |||
| *DAIHEN have been experienced to supply various generation of Vacuum transfer robot such as G1 to G10 in the world. If you have any interest in Vacuum transfer robot, please feel free to contact us. |
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| For FOPLP | |
|---|---|
| SPR-AD008BTN-154/035 | SPR-AD008BWN-154/070 |
