EG-303 series
For 300mm wafers
Features
- ●Edge grip type not to contact on the back side of wafer
- ●Available for quartz wafer
Specifications
| Model | EG-303 | |
|---|---|---|
| Applicable Wafer Size | 300mm | |
| Repeatability | High Accuracy Mode | XY: ±0.05mm θ: ±0.075° |
| Normal Mode | XY: ±0.2mm θ: ±0.1° | |
| Alignment Time | High Accuracy Mode | Average 7.5sec. |
| Normal Mode | Average 3.5sec. | |
| Cleanliness | ISO Class 3 (ISO-14644) | |
| Mass | 7kg | |
| Facilities | Power | 24 VDC 3A |
| Environment | Temperature | 0-40°C |
| Humidity | 70% or less (No condensation) | |
