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Wafer Transfer Robot

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UT-AFX/W4000 series

High payload model for wafers up to 300mm

Standard model which is available for high payload and extensive movement

ACTRANS UT-AFX/W4000 series


  • Integrate servo-amp and adopt wiring-saving by HD-PLC technology
  • High payload handling of Max 4kg including hand and hand folder
  • As the grip method of wafer, vacuum chuck, edge clamp and Bernoulli's chuck are available
  • Bernoulli's hand is going to chuck the back side part of the circumference on TAIKO-wafer

Specifications *1

Model UT-AFW4010NM UT-AFW4000NM
Category Long Arm Type High Payload Type
Robot Type 4axis Cylindrical Coordinate
Operation Range X1, X2-axis 770mm 500mm
θ-axis 340°
Z-axis 300mm or 450mm
R-axis - (182°)
Max. Operation Speed X1, X2-axis 1180mm/sec. 800mm/sec.
θ-axis 200°/sec.
Z-axis 250mm/sec.
R-axis - (180°/sec.)
Cycle Time X1, X2-axis 1.7sec./770mm 1.7sec./500mm
θ-axis 2.2sec./340°
Z-axis 1.6sec./300mm 2.2sec./450mm
R-axis - (1.7sec./180°)
Repeatability XYZ±0.1mm
XYZ±0.1mm, R±0.1°
Payload 1kg/2N·m (*2) 4kg/8N·m (*2)
Cleanliness Edge Clamp E/E Type ISO Class 3 (ISO-14644)
Vacuum E/E Type ISO Class 1 (ISO-14644)
Facilities Air - 0.4-0.7MPa, 200L/min
Vacuum -80kPa, 10NL/min -
Environment Temperature 0-40°C
Humidity 70% or less, No condensation

*1 Transfer perfomance differs from the standard when options are added.
*2 including Hand-folder, Hand and Work