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Wafer Transfer Robot

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UT-VFX3000NM series

For wafers up to 300mm

Vacuum robot for single arm type that arm length and z stroke is selectable



  • Standard model prepares for two kinds of arm length
  • Z-axis presence is selectable
  • Available for various layouts of equipment

Specifications *1

Model (*2) UT-VFX3000NM UT-VFX3010NM
Category Standard Type Long Arm Type
Robot Type 2 (3) axis Cylindrical Coordinate
Operation Range X1, X2-axis 510mm 720mm
θ-axis 340°
Z-axis (*2) (20mm)
Max. Operation Speed X1, X2-axis 948mm/sec. 1339mm/sec.
θ-axis 200°/sec.
Z-axis (*2) (121mm/sec.)
Cycle Time
(Calculated value)
X1, X2-axis 1.2sec./510mm 1.2sec./720mm
θ-axis 2.4sec./340°
Z-axis (*2) (1.0sec./20mm)
Repeatability XYZ direction ±0.1mm each
Payload 0.7kg (Including E/E)
Cleanliness ISO Class 1 (ISO-14644)
Mass (*2) 29kg (35kg)
Environment Temperature 10-40°C (Atmosphere side) /
0-80°C (Vacuum Seal Unit)
Humidity 20-70%, No condensation
Pressure Atmospheric pressure 〜 10-6Pa

*1 Transfer perfomance differs from the standard when options are added.
*2 Numbers in parentheses are for Z axis mounting type.