UT-VFX3000NM series
For wafers up to 300mm
Vacuum robot for single arm type that arm length and z stroke is selectable
Features
- ●Standard model prepares for two kinds of arm length
- ●Z-axis presence is selectable
- ●Available for various layouts of equipment
Specifications *1
| Model (*2) | UT-VFX3000NM | UT-VFX3010NM | |
|---|---|---|---|
| Category | Standard Type | Long Arm Type | |
| Robot Type | 2 (3) axis Cylindrical Coordinate | ||
| Operation Range | X1, X2-axis | 510mm | 720mm |
| θ-axis | 340° | ||
| Z-axis (*2) | (20mm) | ||
| Max. Operation Speed | X1, X2-axis | 948mm/sec. | 1339mm/sec. |
| θ-axis | 200°/sec. | ||
| Z-axis (*2) | (121mm/sec.) | ||
| Cycle Time (Calculated value) |
X1, X2-axis | 1.2sec./510mm | 1.2sec./720mm |
| θ-axis | 2.4sec./340° | ||
| Z-axis (*2) | (1.0sec./20mm) | ||
| Repeatability | XYZ direction ±0.1mm each | ||
| Payload | 0.7kg (Including E/E) | ||
| Cleanliness | ISO Class 1 (ISO-14644) | ||
| Mass (*2) | 29kg (35kg) | ||
| Environment | Temperature | 10-40°C (Atmosphere side) / 0-80°C (Vacuum Seal Unit) |
|
| Humidity | 20-70%, No condensation | ||
| Pressure | Atmospheric pressure 〜 10-6Pa | ||
*1 Transfer perfomance differs from the standard when options are added.
*2 Numbers in parentheses are for Z axis mounting type.
