UTW-REH5500
For wafers up to 300mm
Features
- ●Available for high speed transfer at 450 WPH
Specifications
| Model | UTW-REH5500 | |
|---|---|---|
| Robot Type | 4 axis Cylindrical Coordinate | |
| Operation Range | X, A-axis | 500mm |
| θ-axis | 340° | |
| Z-axis | 300mm | |
| Max. Operation Speed | X, A-axis | 1800mm/sec. |
| θ-axis | 360°/sec. | |
| Z-axis | 500mm/sec. | |
| Cycle Time | X, A-axis | 0.5sec./500mm |
| θ-axis | 1.2sec./340° | |
| Z-axis | 0.8sec./300mm | |
| Repeatability | XYZ direction ±0.1mm each | |
| Payload | 0.5kg/arm (Including E/E) | |
| Cleanliness | ISO Class 3 (ISO-14644) | |
| Mass | 32kg | |
| Facilities | Vacuum | -80kPag or less, 10NL/min |
| Power | 3 Phases 200-230±10% VAC 15A | |
| Environment | Temperature | 0-40°C |
| Humidity | 70% or less (No condensation) | |
