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FPD Transfer Robot

SPR-AD008BWN-154/070
(ETO products)

Payload 8kg

High place transfer type
Double arm robot for FOPLP

SPR-AD008BWN-154/070 (ETO products)

Features

  • Double arm robot for FOPLP
  • Telescopic Z-axis. Stroke : 700mm

Specifications *1

Model SPR-AD008BWN-154/070
Robot Type 5axis Cylindrical Coordinate
Operation Range X1, X2-axis 1545mm (*2)
θ-axis 330°
Z1+Z2-axis 700mm
Max. Operation Speed X1, X2-axis 1618mm/sec.
θ-axis 229°/sec.
Z1+Z2-axis 572mm/sec.
Cycle Time X1, X2-axis 2.2sec./1545mm
θ-axis 3.1sec./330°
Z-axis 2.2sec./700mm
Repeatability XYZ±0.2mm each
Payload 8kg (including E/E)
Cleanliness ISO Class 4 (ISO-14644)
Mass 260kg
Facilities Vacuum -80kPa, 10NL/min
Environment Temperature 5-40°C
Humidity 70% or less, No condensation

*1 Transfer perfomance differs from the standard when options are added
*2 1200mm for x-stroke is available.