UT-VDW3000HS series
For wafers up to 300mm
High-speed, low vibration double-arm vacuum robot that achieves to a significant improvement in equipment throughput by 650wph of ultra high-speed.
Features
- ●Achieves 650WPH of ultra high-speed transfer in vacuum
- ●Equipped with direct drive motors to significantly reduce vibration during arm operation
- ●Improved trajectory accuracy and positioning accuracy by adopting a steel belt for the arm part
- ●Wafer slip prevention by adopting high friction pad for end effector
- ●With wafer center misalignment correction function
Specifications *1
| Model | UT-VDW3000HS series | |
|---|---|---|
| Robot Type | 4 axis Cylindrical Coordinate | |
| Operation Range | X1, X2-axis | 620mm |
| θ-axis | 346° | |
| Z-axis | 50mm | |
| Max. Operation Speed | X1, X2-axis | 380°/sec. |
| θ-axis | 300°/sec. | |
| Z-axis | 185mm/sec. | |
| Operating Time | X1, X2-axis | 0.6sec./620mm |
| θ-axis | 0.7sec./90° | |
| Z-axis | 0.25sec./20mm | |
| Repeatability | XYZ direction: ±0.1mm each(3σ) (*2) | |
| Payload | 2kg (*3) | |
| Cleanliness | ISO Class 1 | |
| Mass | 160kg | |
| Environment | Temperature | 5-40°C(Atomosphere side) / 5-80°C(Arm Unit) |
| Humidity | 20-70%, No condensation | |
| Pressure | Atmospheric pressure 〜 10-6Pa | |
*1 Transfer perfomance differs from the standard when options are added.
*2 by in our evaluation conditions
*3 including Hand-base,Hand and Wafer
