Wafer Transfer Robot (for vacuum environment)
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NEW
For wafers up to 300mm
Double-handled vacuum robot with SCARA arm that contributes to space saving in vacuum transfer area
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NEW
For wafers up to 300mm
High-precision vacuum robot for single arm type equipped with a direct drive motor to significantly reduce vibration
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NEW
For wafers up to 300mm
High-speed, low vibration double-arm vacuum robot that achieves to a significant improvement in equipment throughput by 650wph of ultra high-speed.
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For wafers up to 300mm
High-precision, low-vibration double-arm vacuum robot for high-temperature processes
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For wafers up to 300mm
Vacuum robot for single arm type that arm length and z stroke is selectable
Wafer Transfer Robot (for atmospheric environment)
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NEW
For wafers up to 300mm
Vertically articulated SCARA arm robot that contributes to space saving in atmospheric transfer areas
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For wafers up to 300mm
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High payload model for wafers up to 300mm
Standard model which is available for high payload and extensive movement
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For wafers up to 300mm Standard model
Standard model with power line communication technology
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For wafers up to 300mm
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For wafers up to 300mm Water proof model
Water proof model
with protection class IP64
