UTX/W-RF5500RW
For wafers up to 300mm Water proof model
Water proof model
with protection class IP64
Features
- ●IP64 water/dust proof
- ●Wafer flip axis
Specifications
| Model | UTX-RF5500RW | UTW-RF5500RW | |
|---|---|---|---|
| Robot Type | 3-axis Cylindrical Coordinate | 4-axis Cylindrical Coordinate | |
| Operation Range | X, A-axis | 500mm | |
| θ-axis | 340° | ||
| Z-axis | 300mm | ||
| R-axis | 180° | ||
| Max. Operation Speed | X1, X2-axis | 800mm/sec. | |
| θ-axis | 130°/sec. | ||
| Z-axis | 200mm/sec. | ||
| R-axis | 150°/sec. | ||
| Cycle Time | X1, X2-axis | 1.6sec./500mm | |
| θ-axis | 3.2sec./340° | ||
| Z-axis | 2.5sec./300mm | ||
| R-axis | 2.0sec./180° | ||
| Repeatability | XYZ direction ±0.1mm each | ||
| Payload | 1.5kg/arm (Including E/E, E/E base) | ||
| Cleanliness | ISO Class 4 (ISO-14644) | ||
| Mass | 32kg | 40kg | |
| Facilities | Clamp air | 0.25-0.3MPaG | |
| Internal pressure application and condensation prevention | 0.05MPaG | ||
| Power | 100-115±10% VAC, 50/60Hz, 5A | ||
| Environment | Temperature | 0-40°C | |
| Humidity | 20-70% (No condensation) | ||
