UT-VDX3000NS series
For wafers up to 300mm
High-precision vacuum robot for single arm type equipped with a direct drive motor to significantly reduce vibration
Features
- ●By installing a direct drive motor, vibration during arm operation is greatly reduced
- ●Supports ultra-high vacuum environment by vacuum seal of can type
- ●Contributes to improved equipment throughput with θ axis of endless type
- ●Built-in controller contributes to miniaturization of equipment
- ●With wafer center misalignment correction function
Specifications *1
| Model | UT-VDX3000NS | |
|---|---|---|
| Category | Standard Type | |
| Robot Type | 2 axis Cylindrical Coordinate | |
| Operation Range | X-axis | 850mm |
| θ-axis | Endless | |
| Z-axis | - | |
| Cycle Time | X-axis | 2.0sec / 850mm |
| θ-axis | 2.5sec / 180° | |
| Z-axis | - | |
| Repeatability | XY direction | φ0.02mm(3σ) (*2) |
| Z direction | - | |
| Payload | 1.0kg (*3) | |
| Cleanliness | ISO Class 1 | |
| Mass | 29kg | |
| Environment | Temperature | 5-40°C(Atomosphere side) / 5-80°C(Arm Unit) |
| Humidity | 20-70%, No condensation | |
| Pressure | Atmospheric pressure 〜 10-7Pa | |
*1 Transfer perfomance differs from the standard when options are added.
*2 by in our evaluation conditions
*3 including Hand-base,Hand and Wafer
