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Wafer Transfer Robot

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UT-VDX3000NS series

For wafers up to 300mm

High-precision vacuum robot for single arm type equipped with a direct drive motor to significantly reduce vibration



  • By installing a direct drive motor, vibration during arm operation is greatly reduced
  • Supports ultra-high vacuum environment by vacuum seal of can type
  • Contributes to improved equipment throughput with θ axis of endless type
  • Built-in controller contributes to miniaturization of equipment
  • With wafer center misalignment correction function

Specifications *1

Model UT-VDX3000NS
Category Standard Type
Robot Type 2 axis Cylindrical Coordinate
Operation Range X-axis 850mm
θ-axis Endless
Z-axis -
Cycle Time X-axis 2.0sec / 850mm
θ-axis 2.5sec / 180°
Z-axis -
Repeatability XY direction φ0.02mm(3σ) (*2)
Z direction -
Payload 1.0kg (*3)
Cleanliness ISO Class 1
Mass 29kg
Environment Temperature 5-40°C(Atomosphere side) / 5-80°C(Arm Unit)
Humidity 20-70%, No condensation
Pressure Atmospheric pressure 〜 10-7Pa

*1 Transfer perfomance differs from the standard when options are added.
*2 by in our evaluation conditions
*3 including Hand-base,Hand and Wafer