UT-VSW3000NS series
For wafers up to 300mm
Double-handled vacuum robot with SCARA arm that contributes to space saving in vacuum transfer area
Features
- ●Equipped with a SCARA arm, it is compatible with rectangular transfer modules, contributing to space saving.
- ●Double hand mounting for high speed wafer exchange.
- ●Equipped with a direct-drive motor for high-precision positioning and greatly reduced vibration during arm operation.
- ●Improved trajectory accuracy and positioning accuracy by using steel belts on the arms.
- ●Adoption of vacuum bulkhead seals instead of magnetic fluidic seals enables ultra-high vacuum and low outgassing.
Specifications *1
| Model | UT-VSW3001NS | UT-VSW3002NS | |
|---|---|---|---|
| Robot Type | 5 axis SCARA | ||
| Wafer Gripping Method | Friction gripping method | ||
| Operation Range (*2) | W2-axis (Upper wrist axis) | 20 - 340 ° | |
| W1-axis (Lower wrist axis) | 20 - 340 ° | ||
| B-axis (Elbow axis) | 20 - 340 ° | ||
| A-axis (Shoulder axis) | Endless | ||
| Z-axis (Elevation axis) | 50mm | 135mm | |
| Max. Operation Speed | W2-axis | 150°/sec. | |
| W1-axis | 150°/sec. | ||
| B-axis | Composite interpolation 950 mm/sec. | ||
| A-axis | |||
| Z-axis | 32mm/sec. | ||
| Repeatability | XYZ direction: P-P 0.05 mm each (*3) | ||
| Payload | 1.0kg (*4) | ||
| Cleanliness | ISO Class 1 | ||
| Mass | Approx. 260 kg | Approx. 285 kg | |
| Environment | Temperature | 5-40°C(Robot body) / 5-80°C(Arm) | |
| Humidity | 20-70%, No condensation | ||
| Pressure | Atmospheric pressure 〜 10-6Pa | ||
*1 Transfer perfomance differs from the standard when options are added
*2 Some arm positions are restrictive
*3 by in our evaluation conditions
*4 including Hand and Wafer
