OFH-4100 series
For wafers up to 50-300mm
Features
- ●Alignment speed of the industry most high level
- ●Available for quartz wafer
Specifications
| Model | OFH-4100 | OFH-4101 | OFH-4102 | OFH-4103 | |
|---|---|---|---|---|---|
| Applicable Wafer Size (*1) | 200-300mm | 150-200mm | 100-200mm | 50-150mm | |
| Repeatability | XY: ±0.1mm each, θ: ±0.2° | ||||
| Alignment Time | 1.8sec. (*2) | ||||
| Cleanliness | ISO Class 3 (ISO-14644) | ||||
| Mass | 8kg | ||||
| Facilities | Vacuum | -80KPag or less, 10NL/min | |||
| Power | 24 VDC 3A | ||||
| Environment | Temperature | 15-25°C | |||
| Humidity | 60% or less (No condensation) | ||||
*1 OFH-4100Q is prepared for quartz wafer
*2 In the case of φ50mm wafer, alignment time is 2.5 seconds
