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Wafer Aligner

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OFH-4100 series

For wafers up to 50-300mm

ACTRANS OFH-4100 series

Features

  • Alignment speed of the industry most high level
  • Available for quartz wafer

Specifications

Model OFH-4100 OFH-4101 OFH-4102 OFH-4103
Applicable Wafer Size (*1) 200-300mm 150-200mm 100-200mm 50-150mm
Repeatability XY: ±0.1mm each, θ: ±0.2°
Alignment Time 1.8sec. (*2)
Cleanliness ISO Class 3 (ISO-14644)
Mass 8kg
Facilities Vacuum -80KPag or less, 10NL/min
Power 24 VDC 3A
Environment Temperature 15-25°C
Humidity 60% or less (No condensation)

*1 OFH-4100Q is prepared for quartz wafer
*2 In the case of φ50mm wafer, alignment time is 2.5 seconds