UT-AXW3000NS series
For wafers up to 300mm
Vertically articulated SCARA arm robot that contributes to space saving in atmospheric transfer areas
Features
- ●Vertically articulated and 2-axis horizontal SCARA motion contributes to minimize transfer space in EFEM
- ●Wafer gripping method can be either vacuum chuck or pneumatic edge clamp.
- ●Built-in aligner type will be released
Current robot transfer width
New robot transfer width
- ●Supports 3 to 5 ports with a wide range of vertical and horizontal access.
Specifications *1
| Model | UT-AXW3000NS | UT-AXW3001NS | |
|---|---|---|---|
| Robot Type | 6 axis Vertical Articulated Type | ||
| Wafer Gripping Method | Vacuum check / Edge clamp | ||
| Operation Range (*2) | X-axis | 550 mm | |
| Y-axis | 2200 mm | 2700 mm | |
| Z-axis | 1186 mm | 1436 mm | |
| Max. Operation Speed | X-axis | 1500 mm/sec. | |
| Y-axis | 1500 mm/sec. | ||
| Z-axis | 1500 mm/sec. | ||
| Repeatability | XYZ direction: ±0.05 mm each (*3) | ||
| Payload | 1.0kg (*4) | ||
| Cleanliness | ISO Class 1 | ||
| Mass | Approx. 150 kg | Approx. 155 kg | |
| Environment | Temperature | 5-40°C | |
| Humidity | 20-70%, No condensation | ||
*1 Transfer perfomance differs from the standard when options are added
*2 Some arm positions are restrictive
*3 by in our evaluation conditions
*4 including Hand-base,Hand and Wafer
