UT-AFX/W3000NM
For wafers up to 300mm Standard model
Standard model with power line communication technology
Features
- ●Standard model with power line communication technology
- ●Various options are available
Specifications
| Model | UT-AFX3000NM | UT-AFW3000NM | |
|---|---|---|---|
| Robot Type | 3-axis Cylindrical Coordinate | 4-axis Cylindrical Coordinate | |
| Operation Range | X1, X2-axis | 500mm | |
| θ-axis | 340° | ||
| Z-axis | 300mm or 450mm | ||
| Max. Operation Speed | X1, X2-axis | 1000mm/sec. | |
| θ-axis | 200°/sec. | ||
| Z-axis | 250mm/sec. | ||
| Cycle Time | X1, X2-axis | 1.0sec./500mm | |
| θ-axis | 2.2sec./340° | ||
| Z-axis | 1.5sec./300mm, 2.1sec./450mm | ||
| Repeatability | XYZ direction ±0.1mm each | ||
| Payload | 1.0kg/arm (Including E/E) | ||
| Cleanliness | ISO Class 1 (ISO-14644) | ||
| Mass | 30kg | 32kg | |
| Facilities | Vacuum(for adsorption) | -80kPaG or less, 10NL/min | |
| Vacuum(for Purging) | -80kPaG or less, 10NL/min | ||
| Power | Single-phase 200-230±10% VAC, 50/60Hz, 5A | ||
| Environment | Temperature | 5-45°C | |
| Humidity | 20-70% (No condensation) | ||
