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Clean Transfer Robot

Wafer Transfer Robot (for Vacuum Environment)

  • NEW

    ACTRANS UT-VDX3000NS series

    ACTRANS
    UT-VDX3000NS series

    For wafers up to 300mm

    High-precision vacuum robot for single arm type equipped with a direct drive motor to significantly reduce vibration

  • NEW

    ACTRANS UT-VDW3000HS series

    ACTRANS
    UT-VDW3000HS series

    For wafers up to 300mm

    High-speed, low vibration double-arm vacuum robot that achieves to a significant improvement in equipment throughput by 650wph of ultra high-speed.

  • UTVW-R2800H

    UTVW-R2800H

    For wafers up to 300mm

    High-precision, low-vibration double-arm vacuum robot for high-temperature processes

  • ACTRANS UT-VFX3000NM series

    ACTRANS
    UT-VFX3000NM series

    For wafers up to 300mm

    Vacuum robot for single arm type that arm length and z stroke is selectable

Wafer Transfer Robot (for Atmospheric Environment)