About FPD transfer robot model
| SPR | - | A | D | 008 | B | T | N | - | 154 | / | 034 |
| *1 | *2 | *3 | *4 | *5 | *6 | *7 | *8 |
| *1 | Usage environment | A | for atmospheric environment |
|---|---|---|---|
| V | for vacuum environment | ||
| *2 | Number of E/E | S | 1 |
| D | 2 | ||
| Q | 4 | ||
| *3 | Payload(kg) | ||
| *4 | X-axis shape | B | Belt link |
| L | Parallel link | ||
| R | Linear slide | ||
| S | Scalar arm | ||
| *5 | Z-axis shape | N | Non Z-axis |
| P | Pantalink | ||
| T | Cylinder | ||
| *6 | With or without cooling mechanism | N | Non cooling mechanism |
| C | With cooling mechanism | ||
| *7 | X-axis stroke(mm) *Up to 2nd digits | ||
| *8 | Z-axis stroke(mm) *Up to 2nd digits |
