Clean Transfer Robot

SPR-AD008BTN-154/035
(ETO products)

Payload 8kg

Double arm robot for FOPLP

SPR-AD008BWN-154/070
(ETO products)

Payload 8kg

Double arm robot for FOPLP

SPR-801R

Payload 3kg

Single arm vacuum robot for Gen 3 panel

SPR-804R

Payload 3kg

Single arm vacuum robot with Z-axis for Gen 3 panel

SPR-811R

Payload 15kg

Single arm vacuum robot Gen 4.5 panel

SPR-8565

Payload 35kg

Double arm vacuum robot with Z-axis Gen 4.5 panel

SPR-8566

Payload 50kg

Double arm vacuum robot with Z-axis Gen 5 panel

SPR-8508R

Payload 70kg

Double arm vacuum robot with Z-axis Gen 5.5 panel

SPR-8571

Payload 85kg

Double arm vacuum robot with Z-axis Gen 6 panel

SPR-8572

Payload 85kg

Double arm vacuum robot with Z-axis Gen 6 panel