UTC-R800
For wafers up to 200mm
Features
- ●Recreation of UTC-800 made in MECS
- ●70% reduce power consumption
- ●Change to handheld teach-pendant
Specifications *1
| Model | UTC-R800 | |
|---|---|---|
| Robot Type | 3-axis Cylindrical Coordinate | |
| Operation Range | X-axis | +220mm |
| θ-axis | 360° | |
| Z-axis | 170mm | |
| Max. Operation Speed | X-axis | 330mm/sec |
| θ-axis | 210°/sec | |
| Z-axis | 70mm/sec | |
| Resolution | X-axis | 0.01mm/pulse or less |
| θ-axis | 0.0091°/pulse | |
| Z-axis | 0.003mm/pulse | |
| Repeatability | XYZ direction ±0.1mm each | |
| Payload | 0.2kg (Including E/E) | |
| Cleanliness | ISO Class 3 (ISO-14644) | |
| Mass | 15kg | |
| Facilities | Vacuum | -80KPag or less, 10NL/min |
| Power | 100-115VAC (50/60kHz) 5A | |
| Environment | Temperature | 0-40°C |
| Humidity | 70% or less (No condensation) | |
*1 Transfer perfomance differs from the standard when options are added.
