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RF/MW generators and automatic matching units for plasma applications
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Product
RF/MW generators
Automatic matching units
Frequency:
400kHz
800kHz
2MHz
4MHz
13.56MHz
27.12MHz
40.68MHz
60MHz
100-150MHz
2.45GHz
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Output power:
1kW
3kW
5kW
10kW
15kW
30kW
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