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Clean Transfer Robots
LCD substrates handling robot (for vacuum environment)
■< SPR-801S >
| Configuration |
2-axis cylindrical coordinates system |
| Mass |
35kg |
| Payload |
3kg/arm |
| Operation range |
X-axis: 1080 m (arm: 360 mm)
θ-axis: 330° |
| Oparation speed |
X-axis: 2.9 s/1080mm
θ-axis: 2.6 s/330° |
| Trajectory |
±2.0mm or lees |
| Repeatability |
±0.2mm or lees |
| Withstand vacuum |
1.3×10-6Pa |
| Ambient temperature |
15 to 70°C(Vaccum seal unit)
15 to 35°C (Atmosphere side) |
| Vibration resistance |
4.9m/sec2 or less (0.5 G or less) |
■< SPR-804S >
| Configuration |
3-axis cylindrical coordinates syste |
| Mass |
80kg |
| Payload |
3kg/arm |
| Operation range |
X-axis: 1080 mm (arm: 360 mm)
θ-axis: 330°, Z-axis: 45 mm |
| Oparation speed |
X-axis: 1.9 s/1080 mm
θ-axis: 2.0 s/330°
Z-axis: 1.0 s/45 mm |
| Trajectory |
±2.0mm or lees |
| Repeatability |
±0.2mm or lees |
| Withstand vacuum |
1.3×10-6Pa |
| Ambient temperature |
15 to 70°C(Vaccum seal unit)
15 to 35°C (Atmosphere side) |
| Vibration resistance |
4.9m/sec2 or less (0.5 G or less) |
■< SPR-8503 >
| Configuration |
4-axis cylindrical coordinates system |
| Mass |
900kg |
| Payload |
35kg/arm |
| Operation range |
X-axis: 1730.6 mm (arm: 500mm)
θ-axis: 330°
Z-axis: 100 mm |
| Oparation speed |
X-axis: 2.5 s/1730.6 mm
θ-axis: 2.6 s/180°
Z-axis: 1.2 s/100 mm |
| Drooping |
±3.0 mm or lees |
| Trajectory |
±3.0 mm or lees |
| Repeatability |
±0.3 mm or lees |
| Withstand vacuum |
1.3×10-5Pa |
| Ambient temperature |
15 to 70°C (Vaccum seal unit)
15 to 35°C(Atmosphere side) |
| Vibration resistance |
4.9m/sec2 or less (0.5 G or less) |
■< SPR-8501S >
| Configuration |
4-axis cylindrical coordinates system |
| Mass |
1100kg |
| Payload |
50kg/arm |
| Operation range |
X-axis: 2621.4 mm (arm: 760 mm)
θ-axis: 330°
Z-axis: 100 mm |
| Oparation speed |
X-axis: 2.5 s/2621.4 mm
θ-axis: 2.6 s/180°
Z-axis: 1.2 s/100 mm |
| Drooping |
±5.0mm or lees |
| Trajectory |
±5.0mm or lees |
| Repeatability |
±0.3mm or lees |
| Withstand vacuum |
1.3×10-5Pa |
| Ambient temperature |
15 to 80°C (Vaccum seal unit)
15 to 35°C(Atmosphere side) |
| Vibration resistance |
4.9m/sec2 or less (0.5 G or less) |
■< SPR-8504>
| Confinguration |
4axis cylindrical coordinate |
| Mass |
3000kg |
Payload
|
153kg/arm |
| Operation range |
X-axis 3304.7mm(arm: 920mm)
θ-axis 330°
Z-axis 150mm |
| Operation speed |
X-axis 3.0sec/3304.7mm
θ-axis 3.0sec/180°
Z-axis 1.5sec/100mm |
| Drooping |
±16mm or less |
| Trajectory |
±16mm or less |
| Repeatability |
±0.5mm or less |
| Withstand vacuum |
1.3X10-5Pa |
| Ambient temperature |
+15℃～+80℃(Vacuum seal unit)
+15℃～+35℃(Atmosphere side) |
| Vibration resistance |
4.9m/sec2 or less (0.5G or less) |
■< SPR-8519>
| Configuration |
4 axis cylindrical coodinate |
| Mass |
2800kg |
Payload
|
100kg/arm (include end effector) |
| Operation range |
X-axis 3700mm
θ-axis 330°
Z-axis 600mm |
| Operation speed |
X-axis 2.8sec/3700mm
θ-axis 3.8sec/330°
Z-axis 3.0sec/600mm |
| Drooping |
Within 15mm(Peak to Peak) |
| Trajectory |
Within ±5mm |
| Repeatability |
Within ±0.5mm |
| Withstand vacuum |
1.3X10-5Pa |
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