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Clean Transfer Robot

FPD Transfer Robot (for FOPLP)

FPD Transfer Robot (for vacuum environment)

  • SPR-801R

    SPR-801R

    Payload 3kg

    Single arm vacuum robot for Gen 3 panel

  • SPR-804R

    SPR-804R

    Payload 3kg

    Single arm vacuum robot with Z-axis for Gen 3 panel

  • SPR-811R

    SPR-811R

    Payload 15kg

    Single arm vacuum robot Gen 4.5 panel

  • SPR-8565

    SPR-8565

    Payload 35kg

    Double arm vacuum robot with Z-axis Gen 4.5 panel

  • SPR-8566

    SPR-8566

    Payload 50kg

    Double arm vacuum robot with Z-axis Gen 5 panel

  • SPR-8508R

    SPR-8508R

    Payload 70kg

    Double arm vacuum robot with Z-axis Gen 5.5 panel

  • SPR-8571

    SPR-8571

    Payload 85kg

    Double arm vacuum robot with Z-axis Gen 6 panel

  • SPR-8572

    SPR-8572

    Payload 85kg

    Double arm vacuum robot with Z-axis Gen 6 panel

  • SPR-8573

    SPR-8573

    Payload 120kg

    Double arm vacuum robot with Z-axis Gen 6 panel