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Clean Transfer Robots

Overview


DAIHEN clean robot realized superior repeatabillity with high speed and precise handling in vacuum and atmospheric environment. Also, the robot can handle substarate without particles by optimized smooth motion, and the products reliability are exellent.





Glass Substrate Transfer Products List


Vacuum

（ ■ Available　■ See Spec　■ Under Development）

ACT Substrate Size Single Arm Dual Arm
2axis(X,θ) 3axis(X,θ,Z) 3axis(X2,θ)
4axis(X2,θ,Z)
FPD 2G SPR-801S SPR-804S  
3G SPR-802S
SPR-805S
SPR-807S		    
3.5G SPR-806S    
4G SPR-811S SPR-8106S SPR-8503
5G   SPR-8109 SPR-8501S
5.5G     SPR-8508
6G     SPR-8504
7G    
8G     SPR-8519
10G-      
OLED 2G   SPR-8106S
SPR-8109		 SPR-8503
3G      
3.5G     SPR-8508
4G      


Atmospheric

（■ Available　■ See Spec　■ Under Development ）

ACT Substrate Size Single Arm Dual Arm
3axis(X,θ,Z)
4axis(X,θ,Z2)		 4axis(X2,θ,Z)
5axis(X2,θ,Z2)
FPD 2G SPR-902S SPR-951S
3G SPR-906S  
3.5G    
4G SPR-9019 SPR-9519
5G   SPR-9517
5.5G   SPR-9518
6G  



■Please contact to sales department for more detailed specifications about the products on this website.
     Osaka  TEL : 06-6390-5520～1 / FAX : 06-6308-6372
     Tokyo   TEL : 03-5733-3235 / FAX : 03-5733-2841