Daihen Corporation

Microwave Auto Tuner

DAIHEN's automatic microwave tuning units uses a specially designed computer control, Prediction Correction Algorithm, to improve advanced plasma control.

■CPU control determines the optimized stub position, therefore matching is high speed and accurate as no wasteful stubs motion.
■Maximum 8 operating environment modes storable in the internal memory.
■User-settable reflection coefficient magnitude and phase.
■Communications with process equipments via parallel interfece, communications with PC via a serial interface (RS-232C)

■Microwave Auto Tuner
　 <SMA-10（Tuner)> <CMC-10（Controller)>

Frequency range	2450±30MHz
Allowed transient power	1000 W continuous wave (power ripple: 10% or less)
Matching accuracy	Within 1% (power ratio) *1
Matching speed	Within 2 s *1
Dimensions	(SMA-10)W:260×D:161×H:277 (CMC-10)W:170×D:100×H:40
Mass	(SMA-10)4.7kg (CMC-10)0.5kg
*1 Test result using a dummy load and DAIHEN test system

■Microwave Auto Tuner
　 <SMA-15（Tuner)> <CMC-10（Controller)>

Frequency range	2450±30MHz
Allowed transient power	1500 W continuous wave (power ripple: 10% or less)
Matching accuracy	Within 1% (Power ratio) *1
Matching speed	Within 2 s *1
Dimensions	(SMA-15)W:260×D:161×H:277 (CMC-10)W:170×D:100×H:40
Mass	(SMA-15)4.7kg (CMC-10)0.5kg
*1 Test result using a dummy load and DAIHEN test system

■Microwave Auto Tuner
<SMA-30 (Tuner)> <CMC-10（Controller)>

Output frequency	2460±30MHz
Allowed transient power	3000 W continuous wave (power ripple: 10% or less)
Matching accuracy	Within 1% (Power ratio) *1
Matching speed	Within 2 s *1
Cooling method	Water-cooled
Dimensions	(SMA-30)W:240×D:161×H:277 (CMC-10)W:170×D:100×H:40
Mass	(SMA-30)5.7kg (CMC-10)0.5kg
*1 Test result using a dummy load and DAIHEN test system

■Microwave Auto Tuner
<SMA-50(Tuner)>

Frequency range	2460±30MHz
Allowed transient power	5kW
Matching accuracy	1% or less
Matching speed	2sec or less
Cooling method	Water
Dimensions	W:161×D:260×H:295
Mass	8kg