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RF Automatic Matching Unit


DAIHEN's RF Automatic Matching Unit had developped for superior quality plasma generate, such as "Fine Plasma".

■High speed, high accuracy matching using a computerized tracking control system
■Maximum 8 operating modes storable in the internal memory
■User-settable target matching points
■Communications with process units via parallel interface, communications with PC via a serial interface (RC-232C)
■RF Automatic Matching units used to customize for the equipments. Following specification is for a reference. Please contact to Sales department for more information.　

■RF Automatic Matching Unit <RMN-10(Matching Box)> <CMC-10(Controller)>

Frequency range 13.56MHz
Max. allowable power 1000W
Matching accuracy Within 0.5% (power ratio)　*1
Matching speed Within 1.5 s *1
Cooling method Forced air-cooled
Dimensions (RMN-10)W:280×D:400×H:160
(CMC-10)W:170×D:100×H:40
Mass (RMN-10)8kg
(CMC-10)0.5kg
*1 Test result using a dummy load and DAIHEN test system
■RF Automatic Matching Unit <RMN-30 (Matching Box)> <CMC-10> <ACP-100>

Frequency range 13.56MHz
Max. allowable power 3000W
Matching accuracy Within 0.5% (power ratio) *1
Matching speed Within 3 s *1
Cooling method Water-cooled, forced air-cooled
Dimensions (RMN-30)W:280×D:420×H:165
(CMC-10/ACP-100)W:480×D:110×H:99
Mass (RMN-30)11kg
(CMC-10/ACP-100)3kg
*1 Test result using a dummy load and DAIHEN test system
■RF Automatic Matching Unit <AMN-50 (Matching Box)> <CMC-10> <ACP-100>

Frequency range 60MHz
Max. allowable power 5000W
Matching accuracy Within 1% (power ratio) *1
Matching speed Within 3 s *1
Cooling method Water-cooled, forced air-cooled
Dimensions (AMN-50)W:410×D:388×H:174
(CMC-10/ACP-100)W:480×D:110×H:99
Mass (AMN-50)25kg
(CMC-10/ACP-100)3kg
*1 Test result using a dummy load and DAIHEN test system