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RF Components

RF Generators for Plasma Application

DAIHEN's RF Generators had developped for superior quality plasma generate, such as "Fine Plasma".

■RF Generator for Plasma Application <RGA-50>

Output frequency	13.56MHz
Output frequency stability	Within ±0.01%
Output impedance	50Ω
Rated power	5kW
Output stability	Within ±1% of setting output
Cooling method	Water-cooled, forced air-cooled
Dimensions	W:430×D:600×H:244mm
Mass	65kg

■RF Generator for Plasma Application <MGA-20/WGA-20,30,50>

●Compact lightweight unit that incorporates a high efficiency Class D amplifier and
　　DC-DC converter
●Constant progressive wave output voltage maintained by a good power feedback circuit
●Protected against trouble including output terminal open circuits and shorts

Output frequency	400KHz(MGA-20)/2MHz(WGA-20)/(WGA-30)/(WGA-50)
Output frequency stability	Within ±0.01%
Output impedance	50Ω
Rated power	2kW、3kW、5kW
Output stability	Within ±1% of setting output
Cooling method	Forced air-cooled
Dimensions	W:430×D:570×H:199(2kW)、385(3kW)、399(5kW)mm
Mass	27kg(2kW)、55kg(3kW)、60kg(5kW)

■RF Generator <AGA-50>

Output frequency	60MHz
Output frequency stability	Within ±0.01%
Output impedance	50Ω
Rated power	5kW
Output stability	Within ±1% of setting output
Cooling method	Forced air-cooled / Water
Dimensions	W:430×D:600×H:244mm
Mass	60kg

■RF Generator <RGA-600>

Output frequency	13MHz Range
Output frequency stability	±0.02%
Output impedance	50±2Ω
Rated power	60kW
Output stability	Within ±2% of setting output
Cooling method	Forced air-cooled / Water
Dimensions	W:700×D:1000×H:1310mm
Mass	384kg