Home > Products > Advanced Component Business > Overview of RF/MW components

Overview of RF/MW components

Overview



Reguirements for "Fine Plasma"

■Stable and homogenous plasma　■Damage free to devices


Elemental Technology for Fine Plasma Realization




（ ■ There are the production results　■ Under Development）

  Frequency /
Developed power		 1kW 2kW 3kW 5kW ~15kW ~30kW ~40kW 60kW~
Power 400kHz~2MHz                
13.56MHz       ○       ○
27~60MHz       ○        
100~500MHz                
2.45Ghz ○   ○ ○        
Auto matching box 400kHz~2MHz                
13.56MHz ○   ○          
27~60MHz       ○        
100~500MHz                
2.45GHz ○   ○ ○        



■Please contact to sales department for more detailed specifications about the products on this website.
　 TEL：06-6390-5520～1 / FAX：06-6308-6372