Home>Products>Clean transfer robot>Wafer Transfer Robot>UTX/W-RF6000

Wafer Transfer Robot

Contact Us

UTX/W-RF6000

For wafers up to 200mm

Features

  • ACサーボモーターによる滑らかな動作

Specifications *1

Model UTX-RF6000 UTW-RF6000
Robot Type 3-axis Cylindrical Coordinate 4-axis Cylindrical Coordinate
Operation Range X, A-axis +350mm X: 350mm、A: 385mm/(-85mm)
θ-axis 340°
Z-axis 200mm
Max. Operation Speed X, A-axis 1000mm/sec
θ-axis 450°/sec
Z-axis 400mm/sec
Resolution X, A-axis 0.0042mm/pulse or less
0.001°/pulse (Arm Operation Angle)
θ-axis 0.001°/pulse
Z-axis 0.001mm/pulse
Repeatability XYZ方向:各±0.1mm
Payload 0.5kg (Including E/E)
Cleanliness ISO Class 3 (ISO-14644)
Mass 20kg 25kg
Facilities Vacuum -80KPag or less, 10NL/min
Power 100-115 VAC 5A
Environment Temperature 0-40℃
Humidity 70% or less (No condensation)

*1 オプションを付加した場合の搬送性能は標準と異なります。