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Wafer Transfer Robot

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UTX/W-RF5500

For wafers up to 300mm

Features

  • ACサーボモーターによる滑らかな動作
  • 反転軸・防滴など様々オプションに対応可
    (詳細はお問い合わせください)

Specifications *1

Model UTX-RF5500 UTW-RF5500
Robot Type 3-axis Cylindrical Coordinate 4-axis Cylindrical Coordinate
Operation Range X, A-axis +500mm/(-126mm)
θ-axis 340°
Z-axis 300mm
Max. Operation Speed X, A-axis 1000mm/sec
θ-axis 200°/sec
Z-axis 250mm/sec
Resolution X, A-axis 0.0056mm/pulse or less
0.001°/pulse (Arm Operation Angle)
θ-axis 0.001°/pulse
Z-axis 0.001mm/pulse
Repeatability XYZ方向:各±0.1mm
Payload 0.5kg (Including E/E)
Cleanliness ISO Class 3 (ISO-14644)
Mass 27kg 32kg
Facilities Vacuum -80KPag or less, 10NL/min
Power 100-115 VAC 5A
Environment Temperature 0-40℃
Humidity 70% or less (No condensation)

*1 オプションを付加した場合の搬送性能は標準と異なります。