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Wafer Transfer Robot

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ACTRANS Wafer Transfer Robot
UTX/W-RD6700

For wafers up to 200mm

Features

  • コントローラ内蔵で省スペース化
  • 消費電力を50%低減

Specifications *1

Model UTX-RD6700 UTW-RD6700
Robot Type 3-axis Cylindrical Coordinate 4-axis Cylindrical Coordinate
Operation Range X, A-axis +435mm +385mm/(-85mm)
θ-axis 340°
Z-axis 200mm
Max. Operation Speed X, A-axis 1000mm/sec
θ-axis 320°/sec
Z-axis 250mm/sec
Resolution X, A-axis 0.01mm/pulse or less
0.0018°/pulse (Arm Operation Angle)
θ-axis 0.0018°/pulse
Z-axis 0.002mm/pulse
Repeatability XYZ方向:各±0.1mm
Payload 0.5kg (Including E/E)
Cleanliness ISO Class 3 (ISO-14644)
Mass 21kg 23kg
Facilities Vacuum -80KPag or less, 10NL/min
Power 24 VDC 10A
Environment Temperature 0-40℃
Humidity 70% or less (No condensation)

*1 オプションを付加した場合の搬送性能は標準と異なります。