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Wafer Transfer Robot

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ACTRANS
UTW-REH5500

For wafers up to 300mm

Features

  • 450WPHの高速搬送

Specifications

Model UTW-REH5500
Robot Type 4 axis Cylindrical Coordinate
Operation Range X, A-axis 500mm
θ-axis 340°
Z-axis 300mm
Max. Operation Speed X, A-axis 1800mm/sec.
θ-axis 360°/sec.
Z-axis 500mm/sec.
Cycle Time X, A-axis 0.5sec./500mm
θ-axis 1.2sec./340°
Z-axis 0.8sec./300mm
Repeatability XYZ direction ±0.1mm each
Payload 0.5kg/arm (Including E/E)
Cleanliness ISO Class 3 (ISO-14644)
Mass 32kg
Facilities Vacuum -80kPag or less, 10NL/min
Power 3 Phases 200-230±10% VAC 15A
Environment Temperature 0-40°C
Humidity 70% or less (No condensation)