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Wafer Transfer Robot

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UTVW-R2800H

For wafers up to 300mm, payload 2kg

Features

  • 旋回軸にDDモータを採用し、高精度な動作が可能
  • 可搬重量2kgで、重量物搬送にも対応

Specifications *1

Model UTVW-R2800H
Robot Type 4 axis Cylindrical Coordinate
Operation Range X-axis 680mm
θ-axis 330°
Z-axis 50mm
Max. Operation Speed X, A-axis 120°/sec.
θ-axis 80°/sec.
Z-axis 37.5mm/sec.
Resolution X, A-axis 0.001mm/pulse or less
θ-axis 0.001°/pulse
Z-axis 0.001mm/pulse
Repeatability XYZ direction ±0.1mm each
Payload 2kg (Including E/E)
Cleanliness ISO Class 3 (ISO-14644)
Mass 85kg
Facilities Power Single phase 200-220±10% VAC 3A
Environment Temperature 15-40°C (Atmosphere side)/15-80°C (Vacuum Seal Unit)
Pressure Atmospheric pressure 〜 10-6Pa

*1 オプションを付加した場合の搬送性能は標準と異なります。