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Wafer Transfer Robot

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UTV-RS2600W series

For wafers up to 300mm

Features

  • 多くの採用実績を持つスタンダードなダブルアーム真空ロボット

Specifications *1

Model UTV-RS2600W UTV-RS2620W
Robot Type 4 axis Cylindrical Coordinate
Operation Range X-axis 440mm 545mm
θ-axis 340°
Z-axis 35mm
Max. Operation Speed X, A-axis 1000mm/sec.
θ-axis 216°/sec.
Z-axis 75mm/sec.
Resolution X, A-axis 0.001mm/pulse or less
θ-axis 0.001°/pulse
Z-axis 0.001mm/pulse
Repeatability XYZ方向:各±0.2mm
Payload 0.7kg (Including E/E)
Cleanliness ISO Class 3 (ISO-14644)
Mass 75kg (35kg)
Facilities Power 100-115 VAC 5A
Environment Temperature 0-40°C (Atmosphere side)/0-80°C (Vacuum Seal Unit)
Pressure Atmospheric pressure 〜 10-6Pa

*1 オプションを付加した場合の搬送性能は標準と異なります。