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Wafer Transfer Robot

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UTV-R2700H series

For wafers up to 300mm

Features

  • 3種類のアーム長に標準対応、Z軸の有無も選択でき、様々な装置レイアウトに対応

Specifications *1

Model(*2) UTV-R2700 (H) UTV-R2730 (H) UTV-R2750 (H)
Robot Type 2 (3) axis Cylindrical Coordinate
Operation Range X-axis 510mm 660mm 720mm
θ-axis 340°
Z-axis(*2) (20mm)
Max. Operation Speed X, A-axis 421.92°/sec.
θ-axis 200°/sec.
Z-axis(*2) (121mm/sec.)
Resolution X, A-axis 0.001°/pulse (Arm Operation Angle)
0.060mm/pulse or less 0.077mm/pulse or less 0.084mm/pulse or less
θ-axis 0.001°/pulse
Z-axis(*2) (0.001mm/pulse)
Repeatability XYZ direction ±0.1mm each
Payload 0.7kg (Including E/E)
Cleanliness ISO Class 3 (ISO-14644)
Mass(*2) 29kg (35kg)
Facilities Power 100-115 VAC (50/60kHz) 5A
Environment Temperature 10-40°C (Atmosphere side)/0-80°C (Vacuum Seal Unit)
Pressure Atmospheric pressure 〜 10-6Pa

*1 オプションを付加した場合の搬送性能は標準と異なります。
*2 ( )記載は、Z軸搭載タイプ