Home>Products>Clean transfer robot>Wafer Transfer Robot>ACTRANS UTPX-R5500

Wafer Transfer Robot

Contact Us

ACTRANS
UTPX-R5500

For mask substrate Low pass line model

Low pass line robot
with mast type Z-axis

Features

  • Mast type Z-axis realized low pass line
  • High payload handling capability such as the mask

Specifications

Model UTPX-R5500
Robot Type 3-axis Cylindrical Coordinate
Z-axis unit mast type
Operation Range X-axis 430mm
θ-axis 300°
Z-axis 485mm
Max. Operation Speed X1, X2-axis 500mm/sec
θ-axis 100°/sec
Z-axis 120mm/sec
Cycle Time X1, X2-axis 1.9sec/430mm
θ-axis 3.5sec/300°
Z-axis 4.4sec/485mm
Repeatability XYZ direction ±0.1mm each
Payload 1.5kg/arm (Including E/E)
Cleanliness ISO Class 1 (ISO-14644)
Mass 45kg
Facilities Vacuum(for adsorption) -80kPaG or less, 10NL/min
Vacuum(for Purging) -80kPaG or less, 60NL/min
Power Single phase 170-230 VAC, 50/60Hz, 5A
Environment Temperature 15-40℃
Humidity 20-80% (No condensation)