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Wafer Transfer Robot

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ACTRANS
UTC-R800

For wafers up to 200mm

Features

  • 旧MECS社UTC-800の復刻版
  • 消費電力を70%低減
  • ティーチペンダントを新規搭載

Specifications *1

Model UTC-R800
Robot Type 3-axis Cylindrical Coordinate
Operation Range X-axis +220mm
θ-axis 360°
Z-axis 170mm
Max. Operation Speed X-axis 330mm/sec
θ-axis 210°/sec
Z-axis 70mm/sec
Resolution X-axis 0.01mm/pulse or less
θ-axis 0.0091°/pulse
Z-axis 0.003mm/pulse
Repeatability XYZ direction ±0.1mm each
Payload 0.2kg (Including E/E)
Cleanliness ISO Class 3 (ISO-14644)
Mass 15kg
Facilities Vacuum -80KPag or less, 10NL/min
Power 100-115VAC (50/60kHz) 5A
Environment Temperature 0-40°C
Humidity 70% or less (No condensation)

*1 オプションを付加した場合の搬送性能は標準と異なります。