Home>Products>Clean transfer robot>Wafer Transfer Robot>ACTRANS UT-AFX/W3000NM

Wafer Transfer Robot

Contact Us

ACTRANS
UT-AFX/W3000NM

For wafers up to 300mm Standard model

Standard model with power line communication technology

Features

  • Standard model with power line communication technology
  • Various options are available

Specifications

Model UT-AFX3000NM UT-AFW3000NM
Robot Type 3-axis Cylindrical Coordinate 4-axis Cylindrical Coordinate
Operation Range X1, X2-axis 500mm
θ-axis 340°
Z-axis 300mm or 450mm
Max. Operation Speed X1, X2-axis 1000mm/sec.
θ-axis 200°/sec.
Z-axis 250mm/sec.
Cycle Time X1, X2-axis 1.0sec./500mm
θ-axis 2.2sec./340°
Z-axis 1.5sec./300mm, 2.1sec./450mm
Repeatability XYZ direction ±0.1mm each
Payload 1.0kg/arm (Including E/E)
Cleanliness ISO Class 1 (ISO-14644)
Mass 30kg 32kg
Facilities Vacuum(for adsorption) -80kPaG or less, 10NL/min
Vacuum(for Purging) -80kPaG or less, 10NL/min
Power Single-phase 200-230±10% VAC, 50/60Hz, 5A
Environment Temperature 5-45°C
Humidity 20-70% (No condensation)