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Clean Transfer Robot

Wafer Aligner

For vacuum environment Applicable aligner
50mm OFH-4103
100mm OFH-4102
OFH-4102i
150mm OFH-4101
200mm OFH-4100
AIGIS OFH-4100i
AIGIS2 OFH-4100i2
300mm EG-303

EFEM

Wafer size 2 port 3 port
300mm OPS-2300 series OPS-3100 series

FPD Transfer Robot

For vacuum environment
Payload Panel size (reference) Single arm Double arm
Without Z-axis With Z-axis Link arm Linear slide
3kg G3 SPR-801S SPR-804S
10kg G4 SPR-806S
15kg G4.5 SPR-811S SPR-8110
50kg G5 SPR-8109 SPR-8501S
G6 SPR-8542
70kg G6 SPR-8508
100kg G5 SPR-8111
120kg G6 SPR-8539
SPR-8546
150kg G6 SPR-8112 SPR-8504
200kg G8.5 SPR-8547
300kg G8.5 SPR-8524
500kg G10 Please inquire.
For atmospheric environment
Payload Panel size (reference) Single arm Double arm
3kg G2 SPR-902S
5kg G3/G4 SPR-906S
5kg SPR-9019 SPR-9519
50kg G5/G6 SPR-9518

Vertical Articulated Robot

For atmospheric environment
Payload Model
4kg FDCL-V4MN