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SPR-8547

payload 200kg

Highly proven double arm vacuum robot for Gen 8.5 panel

Features

  • Double arm vacuum robot for Gen 8.5 panel
  • リニアスライドタイプで高い直進性を実現
  • CVD装置への多くの搭載実績

Specifications

Robot Model SPR-8547
Robot Type 4-axis Cylindrical Coordinate
Mass 3800kg
Payload
(End effector isn't included)
X1-axis 130kg or less
X2-axis 180kg or less
Operation Range X-axis 3650mm
θ-axis 340deg.
Z-axis 540mm
Operation Time
(Communication time isn't included)
X-axis 2.5sec./3650mm
θ-axis 2.5sec./180deg.
Z-axis 2.0sec./540mm
Arm level precision (Darre) P-P 6mm or less
(Holder mounting flange from the 3400mm location)
Arm track precision (Meandering) ±5mm or less
(Holder mounting flange from the 3400mm location)
Repeatability XY direction:±1.0mm or less
Z direction:±0.5mm or less
(Holder mounting flange from the 3400mm location)
Cleanliness ISO Class 4
Vacuum-tight degree 1.3×10-3Pa
Temperature X-axis:+20°C〜+160°C
θ・Z-axis:+15°C〜+80°C
Vibration resistance Within 4.9m/sec.2 (0.5G or less)