SPR-8547
payload 200kg
Highly proven double arm vacuum robot for Gen 8.5 panel
Features
- ●Double arm vacuum robot for Gen 8.5 panel
- ●リニアスライドタイプで高い直進性を実現
- ●CVD装置への多くの搭載実績
Specifications
| Robot Model | SPR-8547 | |
|---|---|---|
| Robot Type | 4-axis Cylindrical Coordinate | |
| Mass | 3800kg | |
| Payload (End effector isn't included) |
X1-axis | 130kg or less |
| X2-axis | 180kg or less | |
| Operation Range | X-axis | 3650mm |
| θ-axis | 340deg. | |
| Z-axis | 540mm | |
| Operation Time (Communication time isn't included) |
X-axis | 2.5sec./3650mm |
| θ-axis | 2.5sec./180deg. | |
| Z-axis | 2.0sec./540mm | |
| Arm level precision (Darre) | P-P 6mm or less (Holder mounting flange from the 3400mm location) |
|
| Arm track precision (Meandering) | ±5mm or less (Holder mounting flange from the 3400mm location) |
|
| Repeatability | XY direction:±1.0mm or less Z direction:±0.5mm or less (Holder mounting flange from the 3400mm location) |
|
| Cleanliness | ISO Class 4 | |
| Vacuum-tight degree | 1.3×10-3Pa | |
| Temperature | X-axis:+20°C〜+160°C θ･Z-axis:+15°C〜+80°C |
|
| Vibration resistance | Within 4.9m/sec.2 (0.5G or less) | |
