Contact Us

SPR-8546

payload 120kg, Heat resistant specifications

Double arm heat resistant vacuum robot for Gen 6 panel

Features

  • Double arm vacuum robot for Gen 6 panel
  • リニアスライドタイプで高い直進性を実現
  • 独自の冷却機構で高温環境に対応

Specifications

Robot Model SPR-8546
Robot Type 4-axis Cylindrical Coordinate
Mass 2450kg
Payload
(End effector isn't included)
X1-axis 80kg or less
X2-axis 120kg or less
Operation Range X-axis 2850mm
θ-axis 340deg.
Z-axis 590mm
Operation Time
(Communication time isn't included)
X-axis 3.0sec./2850mm
θ-axis 3.0sec./180deg.
Z-axis 2.0sec./590mm
Arm level precision (Darre) P-P 10mm or less
(Holder mounting flange from the 2300mm location)
Arm track precision (Meandering) ±5mm or less
(Holder mounting flange from the 2300mm location)
Repeatability XY direction:±1.0mm or less
Z direction:±0.5mm or less
(Holder mounting flange from the 2300mm location)
Cleanliness ISO Class 4
Vacuum-tight degree 1.3×10-5Pa
Temperature X-axis:+20°C〜+160°C
θ・Z-axis:+15°C〜+80°C
Vibration resistance Within 4.9m/sec.2 (0.5G or less)