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SPR-8542

payload 50kg

Double arm vacuum robot for Gen 6 panel

Features

  • Double arm vacuum robot for Gen 6 panel
  • エンドレス回転のθ軸とロングリーチZ軸搭載

Specifications

Robot Model SPR-8542
Robot Type 4-axis Cylindrical Coordinate
Mass 2350kg
Payload
(End effector isn't included)
X1-axis 50kg or less
X2-axis 50kg or less
Operation Range X-axis 2620mm
θ-axis 360deg.(Infinite mechanism)
Z-axis 252mm
Operation Time
(Communication time isn't included)
X-axis 2.8sec./2620mm
θ-axis 2.6sec./180deg.
Z-axis 1.8sec./252mm
Arm level precision (Darre) P-P 16mm or less
(Holder mounting flange from the 2300mm location)
Arm track precision (Meandering) P-P 16mm or less
(Holder mounting flange from the 2300mm location)
Repeatability XY direction:±0.5mm or less
Z direction:±0.5mm or less
(Holder mounting flange from the 2300mm location)
Cleanliness ISO Class 4
Vacuum-tight degree 1.3×10-6Pa
Temperature X-axis:+15°C〜+80°C
θ・Z-axis:+15°C〜+35°C
Vibration resistance Within 4.9m/sec.2 (0.5G or less)