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SPR-8539

payload 120kg

Linear slide type double arm vacuum robot for Gen 6 panel

Features

  • Double arm vacuum robot for Gen 6 panel
  • リニアスライドタイプで高い直進性を実現

Specifications

Robot Model SPR-8539
Robot Type 4-axis Cylindrical Coordinate
Mass 2200kg
Payload
(End effector isn't included)
X1-axis 100kg or less
X2-axis 130kg or less
Operation Range X-axis 2450mm
θ-axis 340deg.
Z-axis 220mm
Operation Time
(Communication time isn't included)
X-axis 3.0sec./2450mm
θ-axis 3.0sec./180deg.
Z-axis 2.5sec./220mm
Arm level precision (Darre) P-P 12mm or less
(Holder mounting flange from the 2100mm location)
Arm track precision (Meandering) P-P 10mm or less
(Holder mounting flange from the 2100mm location)
Repeatability XY direction:±0.5mm or less
Z direction:±0.5mm or less
(Holder mounting flange from the 2100mm location)
Cleanliness ISO Class 4
Vacuum-tight degree 1.3×10-5Pa
Temperature X-axis:+15°C〜+70°C
θ・Z-axis:+15°C〜+35°C
Vibration resistance Within 4.9m/sec.2 (0.5G or less)