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FPD Transfer Robot

FPD Transfer Robot (for atmospheric environment)

FPD Transfer Robot (for vacuum environment)

  • SPR-801S

    payload 3kg

    Single arm vacuum robot for Gen 3 panel

  • SPR-806S

    payload 10kg

    Single arm vacuum robot for Gen 4 panel

  • SPR-811S

    payload 15kg

    Single arm vacuum robot for Gen 4.5 panel

  • SPR-8542

    payload 50kg

    Double arm vacuum robot for Gen 6 panel

  • SPR-8546

    payload 120kg
    Heat resistant specifications

    Double arm heat resistant vacuum robot for Gen 6 panel

  • SPR-804S

    payload 3kg

    Single arm vacuum robot with Z-axis for Gen 3 panel

  • SPR-8109

    payload 50kg

    Single arm vacuum robot with Z-axis for Gen 5 panel

  • SPR-8110

    payload 15kg

    Single arm vacuum robot with Z-axis for Gen 4.5 panel

  • SPR-8111

    payload 100kg

    High payload single arm vacuum robot for Gen 5 panel

  • SPR-8112

    payload 150kg

    High payload single arm vacuum robot for Gen 6 panel

  • SPR-8501S

    payload 50kg

    Highly proven double arm vacuum robot for Gen 5 panel

  • SPR-8504

    payload 150kg

    High payload double arm vacuum robot for Gen 6 panel

  • SPR-8508

    payload 70kg

    High payload double arm vacuum robot for Gen 6 panel

  • SPR-8524

    payload 300kg

    High payload double arm vacuum robot for Gen 8.5 panel

  • SPR-8539

    payload 120kg

    Linear slide type double arm vacuum robot for Gen 6 panel

  • SPR-8547

    payload 200kg

    Highly proven double arm vacuum robot for Gen 8.5 panel